Handbook of Ellipsometry

eBook Title for Download :Handbook of Ellipsometry (Format : pdf , Language : English)

Plot :

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.

About the Author

About The Editors:

Harland Tompkins is a consultant with more than thirty years experience in thin films for microelectronics, applied surface science, and vacuum technology. With a Ph.D. in physics from the University of Wisconsin-Milwaukee, he previously worked 12 years at Bell Laboratories and 16 years at Motorola. He has authored more than 75 technical papers and two other best selling books on ellipsometry, one at an introductory level for casual users and the other an intermediate book for process engineers. He is a Fellow of the AVS.

Eugene Irene, a Ph.D. from Rensselaer Polytechnic Institute, is Professor of Chemistry at the University of North Carolina, Chapel Hill. He began his academic career in 1982 after 10 years experience at IBM’s Thomas J. Watson Research Center. He is the author of over 230 publications in the areas of thin films and dielectrics and is the recipient of several awards. He is a Fellow of the AVS.

--This text refers to an alternate

edition.

Author(s) Book :Eugene A Haber, Harland Tompkins
Publish Year :2006 Publisher : William Andrew
You can check by ISBN10/ISBN13 : 0815514999/9780815514992
Pages :902

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